Vermang, B., Rothschild, A.,
Rácz, Á., John, J., Poortmans, J., Mertens, R., Poodt, P., Tiba, V., Roozeboom, F.:
High Speed Atmospheric Pressure ALD for Industrial Scale Solar Cell Passivation.
In: 25th European Photovoltaic Solar Energy Conference and Exhibition / 5th World Conference on Photovoltaic Energy Conversion, 6-10 September 2010, Valencia, Spain, WIP-Renewable Energies, Munich, 1110-1113, 2010.